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Probe inner geometry

Maria Milla

Our FluidFM cantilevers are made of silicon nitride and based on microfabrication technology. As shown in the picture below (a), they have a length of 200 µm and a width of 36 µm. The microchannel within the cantilever has a height that oscillates between 0.5 and 1.5 µm. At the far end of each cantilever, there is an aperture that connects the microchannel inside. Its size varies between 100 nm and 8 µm and gives, together with the tip shape, the functionality to the cantilever: nanopipette, nanosyringe, or micropipette. In the case of the nanosyringes, the cantilever has a pyramid on the tip, with a height of 7 µm.

Figure. Scanning electron micrographs of FluidFM cantilevers (nanosyringes), showing their dimensions. (a) top view of a FluidFM cantilever, with a length and width of 200 µm and 36 µm respectively; (b) FIB cut through a nanosyringe shows the inner geometry of the pyramid (height 7µm) and the microchannel (height 0.5-1.5 µm). 

More information about probe geometry can be found in the following entries:

How thick are the channels and walls of FluidFM micropipettes?

Theory on FluidFM probes: Mechanics and Fluidics