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PRINTING AT NANOMETER SCALE. 

NANOLITHOGRAPHY  

 

Reinventing AFM Based Nanolithography.

Etching, writing and printing structures at the nanometer scale with AFM has never been more powerful.

FluidFM® technology takes AFM based nanolithography to new levels. Our unique FluidFM probes make it easy for you to carry out lithography experiments; be it in liquid or in ambient air environment. Extend your experimental freedom with FluidFM nanolithography.

FluidFM Nanolithography Lines of Nanoparticles

Precise

fL FLOW CONTROL

Fast

UNLIMITED INK RESERVOIR

Versatile

LIQUID & AIR ENVIRONMENT

vast

CHOICE OF INKS

FluidFM Nanolithography

Innovative Technology.

Take advantage of the versatility of FluidFM to give your nanolithography task an unparalleled flexibility.

Thanks to FluidFM technology you are no longer limited to ambient air environments for your AFM based lithography applications. The closed microfluidic system inside FluidFM probes extends this technique to work even on completely immersed samples. At the same time you can take advantage of virtually limitless choice of suitable inking solutions. The technology ensures full control over mission critical parameters such as dispensing volumes, mechanical interactions and spatial positioning with respect to your sample. Create complex patterns at the nanoscale like never before.

 

Pressure Based Deposition.

FluidFM technology allows for nanolithography in a simple process with full control.

Once in contact with the target surface, deposition of ink solution is achieved via a sophisticated, pressure based microfluidics control system. Simultaneous tuning of the contact force and spatial coordinates of the FluidFM probe enables the generation of complex patterns with nanometer precision; both in air and liquid.

 

Cytosurge FluidFM Nanolithography Precision at Nanoscale

Writing as small as a few nanometers?

We provide you with all the information.

Contact us

 

Add-on for afm


Find out more about the add-on for AFM which is used for nanolithography 
  

 

Probes


Learn more about the probes that are used t
o write and etch at nanometer scale  

 

Factsheet


Download the factsheet for nanolithography
  

 

SELECTED PUBLICATIONS

2018

W. N. Deng, S. Wang, J. Ventrici de Souza, T. L. Kuhl & G.-Y. Liu. New Algorithm to Enable Construction and Display of 3D Structures from Scanning Probe Microscopy Images Acquired Layer-by-Layer. The Journal of Physical Chemistry A, 122(26), 5756-5763. doi: 10.1021/acs.jpca.8b03417


2017

J.V. de Souza, Y. Liu, S. Wang, P. Dörig, T. L. Kuhl, J. Frommer & G.-Y. Liu.   Three-Dimensional Nanoprinting via Direct Delivery.   The Journal Of Physical Chemistry B. doi: 10.1021/acs.jpcb.7b0697 

N. Helfricht, A. Mark, M. Behr, A. Bernet, H.W. Schmidt & G. Papastavrou. Writing with Fluid: Structuring Hydrogels with Micrometer Precision by AFM in Combination with Nanofluidics. (Aug 2017) Small, 13(31). doi:10.1002/smll.201700962 

 

2015

J. Geerlings, E. Sarajlic, E.J.W. Berenschot, R.G.P. Sanders, M.H. Siekman, L. Abelmann & N.R. Tas. Electric field controlled nanoscale contactless deposition using a nanofluidic scanning probe.  Applied Physics Letters, 107(12), 123109. doi:10.1063/1.4931354

R.R. Grüter, B. Dielacher, L. Hirt, J. Vörös & T. Zambelli. Patterning gold nanoparticles in liquid environment with high ionic strength for local fabrication of up to 100 µm long metallic interconnections.  Nanotechnology, 26(17), 175301. doi:10.1088/0957-4484/26/17/175301

L. Hirt, R.R. Grüter, T. Berthelot, R. Cornut, J. Vörös & T. Zambelli. Local surface modification via confined electrochemical deposition with FluidFM.  RSC Adv., 5(103), 84517 — 84522. doi:10.1039/C5RA07239E

 

2014

H. Dermutz, R.R. Grüter, A.M. Truong, L. Demkó, J. Vörös & T. Zambelli.  Local polymer replacement for neuron patterning and in situ neurite guidance.    Langmuir: the ACS journal of surfaces and colloids, 30(23), 7037 — 46. doi:10.1021/la5012692

J. Geerlings, E. Sarajlic, J.W. Berenschot, R.G.P. Sanders, L. Abelmann & N.R. Tas.  Electrospray deposition from AFM probes with nanoscale apertures.  In MEMS 2014 (pp. 100 — 103). San Francisco: IEEE. Retrived from  http://ieeexplore.iee.org/xpls/abs_all.jsp?arnumber=676558 

 

2013

R.R. Grüter, J. Vörös & T. Zambelli. FluidFM as a lithography tool in liquid: spatially controlled deposition of fluorescent nanoparticles.  Nanoscale, 5(3), 1097 — 104. doi:10.1039/c2nr332140k

 

2009

A. Meister, M. Gabi, P. Behr, P. Studer, J. Vörös, P. Niedermann, J. Bitterli, J. Polesel - Maris, M. Liley, H. Heinzelmann & T. Zambelli.  FluidFM: Combining atomic force microscopy and nanofluidics in an universal liquid delivery system for single cell applications and beyond.  (2009) Nano Letters, 9 (6), 2501–2507. doi:10.1021/nl901384x

 

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